Interplay between parameter variation and oxide structure of a modified PAA process

M. Schneider, K. Kremmer, S.K. Weidmann, W. Fürbeth

Surf. Interface Anal. 45 (2013) 1503-1509; DOI: 10.1002/sia.5248


In the present work, the robustness of an anodizing process was tested. Important anodizing parameters such as the anodizing potential, the dwell time at the anodizing potential, and the bath temperature were varied. The influence of the parameter variation on the microstructure of the oxide layers was investigated by SEM. It could be shown that the pore diameter as well as the layer thickness reacts very sensitively on the alternating parameters. The barrier layer thickness clearly depends on the anodizing voltage but is independent on the dwell time.

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